From skoh at snf.stanford.edu  Fri Feb 16 10:31:42 2007
From: skoh at snf.stanford.edu (skoh at snf.stanford.edu)
Date: Fri, 16 Feb 2007 10:31:42 -0800
Subject: Problem gasonics SNF 2007-02-16 10:31:41: Door stuck open
Message-ID: <mailman.198.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Door can't close because wafer loader is in the way.



From skoh at snf.stanford.edu  Fri Feb 16 10:54:26 2007
From: skoh at snf.stanford.edu (skoh at snf.stanford.edu)
Date: Fri, 16 Feb 2007 10:54:26 -0800
Subject: Comment gasonics SNF 2007-02-16 10:54:25: Elmer fixed the door problem
Message-ID: <mailman.199.1356281731.3883.gasonics-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Fri Feb 16 11:17:49 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 16 Feb 2007 11:17:49 -0800
Subject: Problem gasonics SNF 2007-02-16 10:31:41: Door stuck open
Message-ID: <mailman.200.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Reset the system.



From eenriquez at snf.stanford.edu  Fri Feb 16 11:18:01 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 16 Feb 2007 11:18:01 -0800
Subject: Comment gasonics SNF 2007-02-16 10:54:25: Elmer fixed the door problem
Message-ID: <mailman.201.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Reset the system