Problem gasonics SNF 2007-02-16 10:31:41: Door stuck open
skoh at snf.stanford.edu
skoh at snf.stanford.edu
Fri Feb 16 10:31:42 PST 2007
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Problem gasonics SNF 2007-02-16 10:31:41: Door stuck open
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Door can't close because wafer loader is in the way.
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Problem gasonics SNF 2007-02-16 10:31:41: Door stuck open
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