From emyers at snf.stanford.edu  Thu Jul  5 16:57:09 2007
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Thu, 5 Jul 2007 16:57:09 -0700
Subject: Shutdown gasonics SNF 2007-07-05 16:57:09: Software Lock Up
Message-ID: <mailman.228.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Recovered wafer, but can not get the software past "clearing wafer path" error.  Tried restarting several times.



From eenriquez at snf.stanford.edu  Fri Jul  6 08:33:18 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 6 Jul 2007 08:33:18 -0700
Subject: Shutdown gasonics SNF 2007-07-05 16:57:09: Software Lock Up
Message-ID: <mailman.229.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Power cycled the system.  Ran 10 wafers without any problems.



From hra at snf.stanford.edu  Tue Jul 10 22:33:01 2007
From: hra at snf.stanford.edu (hra at snf.stanford.edu)
Date: Tue, 10 Jul 2007 22:33:01 -0700
Subject: Problem gasonics SNF 2007-07-10 22:33:00: chamber door cannot be closed
Message-ID: <mailman.230.1356281731.3883.gasonics-pcs@snf.stanford.edu>

I can't close the chamber door.   Therefore, I put the machine down.



From eenriquez at snf.stanford.edu  Wed Jul 11 08:57:11 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 11 Jul 2007 08:57:11 -0700
Subject: Problem gasonics SNF 2007-07-10 22:33:00: chamber door cannot be closed
Message-ID: <mailman.231.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Reset the system.  Found the pressure controller had been turned off.  Cycled 5 wafers with no problems.



From hra at snf.stanford.edu  Wed Jul 11 22:22:25 2007
From: hra at snf.stanford.edu (hra at snf.stanford.edu)
Date: Wed, 11 Jul 2007 22:22:25 -0700
Subject: Problem gasonics SNF 2007-07-11 22:22:25: output cassette full error
Message-ID: <mailman.232.1356281731.3883.gasonics-pcs@snf.stanford.edu>

The screen says "output cassette full *error" when the output casette is actually empty. A test wafer is inside the chamber and the door will not open. 



From cbaxter at snf.stanford.edu  Thu Jul 12 14:33:35 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 12 Jul 2007 14:33:35 -0700
Subject: Comment stsetch SNF 2007-06-25 13:36:45: Bad backing dry pump.
Message-ID: <mailman.233.1356281731.3883.gasonics-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Jul 12 14:34:28 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 12 Jul 2007 14:34:28 -0700
Subject: Problem gasonics SNF 2007-07-11 22:22:25: output cassette full error
Message-ID: <mailman.234.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Adjusted output sensor and cycled 25 wafer on maint. mode
w/out problem