Problem gasonics SNF 2007-07-11 22:22:25: output cassette full error

hra at snf.stanford.edu hra at snf.stanford.edu
Wed Jul 11 22:22:25 PDT 2007


The screen says "output cassette full *error" when the output casette is actually empty. A test wafer is inside the chamber and the door will not open. 




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