From wessmith at snf.stanford.edu  Wed Jun  6 11:03:53 2007
From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu)
Date: Wed, 6 Jun 2007 11:03:53 -0700
Subject: Comment gasonics SNF 2007-06-06 11:03:53: Input Arm Errors
Message-ID: <mailman.222.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Had difficulty getting input arm to grab wafers- had to try many times.



From jackson at snf.stanford.edu  Mon Jun 11 22:37:56 2007
From: jackson at snf.stanford.edu (jackson at snf.stanford.edu)
Date: Mon, 11 Jun 2007 22:37:56 -0700
Subject: Shutdown gasonics SNF 2007-06-11 22:37:56: wfr stuck in chamber
Message-ID: <mailman.223.1356281731.3883.gasonics-pcs@snf.stanford.edu>

My wafer processed in the chamber but error'd because it thought the output cassette was full (it wasn't) I tried to reseat the cassette and start....nothing.  Tried stop/abort....nothing.
When this is fixed please unload my wafer into the box on the gasonics and leave on top of the machine, I need it....thanks



From eenriquez at snf.stanford.edu  Tue Jun 12 08:18:25 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 12 Jun 2007 08:18:25 -0700
Subject: Shutdown gasonics SNF 2007-06-11 22:37:56: wfr stuck in chamber
Message-ID: <mailman.224.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Somebody unloaded the wafer.  Adjusted output cassette position and cycled 15 wafers with no problem.



From eenriquez at snf.stanford.edu  Tue Jun 12 08:18:59 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 12 Jun 2007 08:18:59 -0700
Subject: Comment gasonics SNF 2007-06-06 11:03:53: Input Arm Errors
Message-ID: <mailman.225.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Cycled 15 wafers with problem.



From kocabas at snf.stanford.edu  Thu Jun 21 15:08:28 2007
From: kocabas at snf.stanford.edu (kocabas at snf.stanford.edu)
Date: Thu, 21 Jun 2007 15:08:28 -0700
Subject: Problem gasonics SNF 2007-06-21 15:08:27: Loading mechanism doesn't work
Message-ID: <mailman.226.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Cannot load wafers, robot arm is not able to pick the wafers. There seems to be a vacuum problem, can hear a hissing sound while the arm is trying to hold the wafer.



From eenriquez at snf.stanford.edu  Fri Jun 22 08:59:21 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 22 Jun 2007 08:59:21 -0700
Subject: Problem gasonics SNF 2007-06-21 15:08:27: Loading mechanism doesn't work
Message-ID: <mailman.227.1356281731.3883.gasonics-pcs@snf.stanford.edu>

System was locked up.  Reset the system.  Ran 8 wafers with no problems.