Shutdown gasonics SNF 2007-06-11 22:37:56: wfr stuck in chamber

jackson at snf.stanford.edu jackson at snf.stanford.edu
Mon Jun 11 22:37:56 PDT 2007


My wafer processed in the chamber but error'd because it thought the output cassette was full (it wasn't) I tried to reseat the cassette and start....nothing.  Tried stop/abort....nothing.
When this is fixed please unload my wafer into the box on the gasonics and leave on top of the machine, I need it....thanks




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