Shutdown gasonics SNF 2007-06-11 22:37:56: wfr stuck in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Jun 12 08:18:25 PDT 2007


Somebody unloaded the wafer.  Adjusted output cassette position and cycled 15 wafers with no problem.




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