Comment gasonics SNF 2007-06-06 11:03:53: Input Arm Errors
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Jun 12 08:18:59 PDT 2007
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Comment gasonics SNF 2007-06-06 11:03:53: Input Arm Errors
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Cycled 15 wafers with problem.
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Comment gasonics SNF 2007-06-06 11:03:53: Input Arm Errors
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Shutdown gasonics SNF 2007-06-11 22:37:56: wfr stuck in chamber
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