Problem gasonics SNF 2007-06-21 15:08:27: Loading mechanism doesn't work

kocabas at snf.stanford.edu kocabas at snf.stanford.edu
Thu Jun 21 15:08:28 PDT 2007


Cannot load wafers, robot arm is not able to pick the wafers. There seems to be a vacuum problem, can hear a hissing sound while the arm is trying to hold the wafer.




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