From chozone at snf.stanford.edu  Tue Mar 27 15:11:42 2007
From: chozone at snf.stanford.edu (chozone at snf.stanford.edu)
Date: Tue, 27 Mar 2007 15:11:42 -0700
Subject: Shutdown gasonics SNF 2007-03-27 15:11:41: A wafer is broken at the gate
Message-ID: <mailman.202.1356281731.3883.gasonics-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Wed Mar 28 07:16:51 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 28 Mar 2007 07:16:51 -0700
Subject: Shutdown gasonics SNF 2007-03-27 15:11:41: A wafer is broken at the gate
Message-ID: <mailman.203.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Cleaned the chamber and handler.  Retightened a loose wafer pin.  Cycled wafers with no problems.