From joongsun at snf.stanford.edu  Fri May 18 00:07:58 2007
From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu)
Date: Fri, 18 May 2007 00:07:58 -0700
Subject: Shutdown gasonics SNF 2007-05-18 00:07:57: Wafer is broken
Message-ID: <mailman.212.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Broken wafer is inside the chamber.



From cbaxter at snf.stanford.edu  Fri May 18 09:15:51 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Fri, 18 May 2007 09:15:51 -0700
Subject: Shutdown gasonics SNF 2007-05-18 00:07:57: Wafer is broken
Message-ID: <mailman.213.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Cleaned up broken wafer inside the chamber and 
verified wafer handoff.



From yuhykr at snf.stanford.edu  Sat May 19 23:50:39 2007
From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu)
Date: Sat, 19 May 2007 23:50:39 -0700
Subject: Problem gasonics SNF 2007-05-19 23:50:38: error at the warm up step
Message-ID: <mailman.214.1356281731.3883.gasonics-pcs@snf.stanford.edu>




From fengj at snf.stanford.edu  Sun May 20 03:41:41 2007
From: fengj at snf.stanford.edu (fengj at snf.stanford.edu)
Date: Sun, 20 May 2007 03:41:41 -0700
Subject: Shutdown gasonics SNF 2007-05-20 03:41:34: Error at crossover
Message-ID: <mailman.215.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Probably due to pump failure caused by the power failure



From cbaxter at snf.stanford.edu  Mon May 21 08:10:50 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 21 May 2007 08:10:50 -0700
Subject: Shutdown gasonics SNF 2007-05-20 03:41:34: Error at crossover
Message-ID: <mailman.216.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Reset system



From cbaxter at snf.stanford.edu  Mon May 21 09:02:02 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 21 May 2007 09:02:02 -0700
Subject: Problem gasonics SNF 2007-05-19 23:50:38: error at the warm up step
Message-ID: <mailman.217.1356281731.3883.gasonics-pcs@snf.stanford.edu>




From gth at snf.stanford.edu  Mon May 21 20:27:29 2007
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Mon, 21 May 2007 20:27:29 -0700
Subject: Problem gasonics SNF 2007-05-21 20:27:28: broke my wafer
Message-ID: <mailman.218.1356281731.3883.gasonics-pcs@snf.stanford.edu>

good evening Ed
i showed you the problem today on gasonics. I had trouble again loading the wafer after the recepie finishes, this time I could not save my wafer and the wafer broke.
the stage is not able to load to the output cassette.
please look into the problem.
thanks
-gaurav



From eenriquez at snf.stanford.edu  Tue May 22 09:21:43 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 22 May 2007 09:21:43 -0700
Subject: Problem gasonics SNF 2007-05-21 20:27:28: broke my wafer
Message-ID: <mailman.219.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Cleaned off cassette area.  Adjusted the unload arm height and cycled wafers. 



From gth at snf.stanford.edu  Wed May 23 11:48:10 2007
From: gth at snf.stanford.edu (gth at snf.stanford.edu)
Date: Wed, 23 May 2007 11:48:10 -0700
Subject: Problem gasonics SNF 2007-05-23 11:48:10: problem again:uload arm
Message-ID: <mailman.220.1356281731.3883.gasonics-pcs@snf.stanford.edu>

unload arm height is giving problem again. two of my wafers fell down,
the good part was they did not break.
thanks
-gaurav 



From cbaxter at snf.stanford.edu  Wed May 23 13:08:55 2007
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 23 May 2007 13:08:55 -0700
Subject: Problem gasonics SNF 2007-05-23 11:48:10: problem again:uload arm
Message-ID: <mailman.221.1356281731.3883.gasonics-pcs@snf.stanford.edu>

Adjusted height on unload arm pick up.