Shutdown gasonics SNF 2007-05-18 00:07:57: Wafer is broken
joongsun at snf.stanford.edu
joongsun at snf.stanford.edu
Fri May 18 00:07:58 PDT 2007
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Shutdown gasonics SNF 2007-05-18 00:07:57: Wafer is broken
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Broken wafer is inside the chamber.
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Shutdown gasonics SNF 2007-05-18 00:07:57: Wafer is broken
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