Problem gasonics SNF 2007-05-21 20:27:28: broke my wafer

gth at snf.stanford.edu gth at snf.stanford.edu
Mon May 21 20:27:29 PDT 2007


good evening Ed
i showed you the problem today on gasonics. I had trouble again loading the wafer after the recepie finishes, this time I could not save my wafer and the wafer broke.
the stage is not able to load to the output cassette.
please look into the problem.
thanks
-gaurav




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