From takuyan at snf.stanford.edu Mon Nov 5 19:33:00 2007 From: takuyan at snf.stanford.edu (takuyan at snf.stanford.edu) Date: Mon, 5 Nov 2007 19:33:00 -0800 Subject: Problem gasonics SNF 2007-11-05 19:32:59: Still a wafer inside! Message-ID: The machine stopped with transporting problem. I tried to restart by pressing the start button but no action. A wafer is trapped in the chamber. From eenriquez at snf.stanford.edu Tue Nov 6 10:08:55 2007 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Nov 2007 10:08:55 -0800 Subject: Problem gasonics SNF 2007-11-05 19:32:59: Still a wafer inside! Message-ID: Reset system. Cycled wafers with no problems. From sbasumal at snf.stanford.edu Sun Nov 11 18:29:38 2007 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Sun, 11 Nov 2007 18:29:38 -0800 Subject: Comment gasonics SNF 2007-11-11 18:29:37: Wafer Broke Message-ID: The transfer arm dropped my wafer while transferring to the output cassette. I have removed all the big wafer pieces that I could see. But there are still a lot of particles. I ran some more wafers. The transfer was ok. From sbasumal at snf.stanford.edu Sun Nov 11 18:30:01 2007 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Sun, 11 Nov 2007 18:30:01 -0800 Subject: Problem gasonics SNF 2007-11-11 18:30:01: Message-ID: From cbaxter at snf.stanford.edu Mon Nov 12 07:41:36 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Nov 2007 07:41:36 -0800 Subject: Comment gasonics SNF 2007-11-11 18:29:37: Wafer Broke Message-ID: Cleaned up broken wafer chips From cbaxter at snf.stanford.edu Mon Nov 12 07:41:45 2007 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Nov 2007 07:41:45 -0800 Subject: Problem gasonics SNF 2007-11-11 18:30:01: Message-ID: From bchui at snf.stanford.edu Mon Nov 12 23:40:08 2007 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 12 Nov 2007 23:40:08 -0800 Subject: Problem gasonics SNF 2007-11-12 23:40:08: Exit cassette missing Message-ID: From gyama at snf.stanford.edu Tue Nov 13 09:36:17 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Tue, 13 Nov 2007 09:36:17 -0800 Subject: Comment gasonics SNF 2007-11-13 09:36:17: where is the exit cassette? Message-ID: From emyers at snf.stanford.edu Wed Nov 14 10:01:39 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 14 Nov 2007 10:01:39 -0800 Subject: Problem gasonics SNF 2007-11-12 23:40:08: Exit cassette missing Message-ID: Nancy our savior. From emyers at snf.stanford.edu Wed Nov 14 10:01:47 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 14 Nov 2007 10:01:47 -0800 Subject: Comment gasonics SNF 2007-11-13 09:36:17: where is the exit cassette? Message-ID: Nancy our savior. From emyers at snf.stanford.edu Wed Nov 14 10:01:57 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 14 Nov 2007 10:01:57 -0800 Subject: Comment gasonics SNF 2007-09-05 20:11:12: no problems observed Message-ID: From emyers at snf.stanford.edu Wed Nov 14 10:02:06 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 14 Nov 2007 10:02:06 -0800 Subject: Comment gasonics SNF 2007-08-17 14:36:50: Update Message-ID: From emyers at snf.stanford.edu Wed Nov 14 10:02:13 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 14 Nov 2007 10:02:13 -0800 Subject: Comment gasonics SNF 2007-08-28 13:04:20: Annual PM rescheduled for Thursday Message-ID: