Problem gasonics SNF 2007-11-05 19:32:59: Still a wafer inside!

takuyan at snf.stanford.edu takuyan at snf.stanford.edu
Mon Nov 5 19:33:00 PST 2007


The machine stopped  with transporting problem.
I tried to restart by pressing the start button but no action.
A wafer is trapped in the chamber.




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