Comment gasonics SNF 2007-11-11 18:29:37: Wafer Broke

sbasumal at snf.stanford.edu sbasumal at snf.stanford.edu
Sun Nov 11 18:29:38 PST 2007


The transfer arm dropped my wafer while transferring to the output cassette. I have removed all the big wafer pieces that I could see. But there are still a lot of particles. I ran some more wafers. The transfer was ok.




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