From jsuarez at snf.stanford.edu  Thu Oct  4 11:16:49 2007
From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu)
Date: Thu, 4 Oct 2007 11:16:49 -0700
Subject: Problem gasonics SNF 2007-10-04 11:16:48: did not load wafer
Message-ID: <mailman.272.1356281732.3883.gasonics-pcs@snf.stanford.edu>

Error message:  Load arm not fully up



From eenriquez at snf.stanford.edu  Fri Oct  5 10:49:00 2007
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 5 Oct 2007 10:49:00 -0700
Subject: Problem gasonics SNF 2007-10-04 11:16:48: did not load wafer
Message-ID: <mailman.273.1356281732.3883.gasonics-pcs@snf.stanford.edu>

Adjusted load arm height.  Cycled 12 wafers with no problems.