Comment gasonics SNF 2007-09-05 20:11:12: no problems observed
kupnik at snf.stanford.edu
kupnik at snf.stanford.edu
Wed Sep 5 20:11:13 PDT 2007
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Problem gasonics SNF 2007-09-03 21:09:25: wafer does not come out
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Shutdown gasonics SNF 2007-09-06 07:48:03: Due for annual pm.
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Gasonics worked perfect
Previous message:
Problem gasonics SNF 2007-09-03 21:09:25: wafer does not come out
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Shutdown gasonics SNF 2007-09-06 07:48:03: Due for annual pm.
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