Problem gasonics SNF 2007-09-07 09:33:46: Wafer trapped in system. Cannot recover.

mrobles at snf.stanford.edu mrobles at snf.stanford.edu
Fri Sep 7 09:33:46 PDT 2007


Getting "Output cassette full" error (no wafers in output cassette).  Start and Stop do nothing.  Wafer trapped in system.




More information about the gasonics-pcs mailing list