Problem gasonics SNF 2007-09-07 09:33:46: Wafer trapped in system. Cannot recover.
latta at snf.stanford.edu
latta at snf.stanford.edu
Fri Sep 7 13:42:45 PDT 2007
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Problem gasonics SNF 2007-09-07 09:33:46: Wafer trapped in system. Cannot recover.
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Shutdown gasonics SNF 2007-09-07 09:34:48: Wafer trapped in system.
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ok now. wafer i9n dummy cassette.
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Problem gasonics SNF 2007-09-07 09:33:46: Wafer trapped in system. Cannot recover.
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Shutdown gasonics SNF 2007-09-07 09:34:48: Wafer trapped in system.
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