Shutdown gasonics SNF 2007-09-07 23:21:21: Wafer stuck inside the chamber

peichen at snf.stanford.edu peichen at snf.stanford.edu
Fri Sep 7 23:21:22 PDT 2007

Previous message: Shutdown gasonics SNF 2007-09-07 09:34:48: Wafer trapped in system.
Next message: Shutdown gasonics SNF 2007-09-07 23:21:21: Wafer stuck inside the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

The output cassette miscatch my wafer and cause an error. Now a piece of my wafer is stuck inside.

Previous message: Shutdown gasonics SNF 2007-09-07 09:34:48: Wafer trapped in system.
Next message: Shutdown gasonics SNF 2007-09-07 23:21:21: Wafer stuck inside the chamber
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the gasonics-pcs mailing list