Shutdown gasonics SNF 2007-09-07 23:21:21: Wafer stuck inside the chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Sep 10 10:25:49 PDT 2007

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adjusted wafer present sensor  on unload cassette.

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Next message: Problem gasonics SNF 2007-09-10 15:12:41: Wafer handler dropped a wafer and the door smashed it
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