Problem gasonics SNF 2007-09-10 15:12:41: Wafer handler dropped a wafer and the door smashed it

king at snf.stanford.edu king at snf.stanford.edu
Mon Sep 10 15:12:42 PDT 2007


Device wafer, of course, after several dummies.  It needs to be vacuumed and inspected. 




More information about the gasonics-pcs mailing list