From latta at snf.stanford.edu  Wed Apr  2 11:00:03 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 2 Apr 2008 11:00:03 -0700
Subject: Problem gasonics SNF 2008-04-02 11:00:02: ashed wafer just fine, but did not put back....
Message-ID: <mailman.295.1356281732.3883.gasonics-pcs@snf.stanford.edu>

.. into output cassette.  Unloaded from chamber fine.



From mdickey at snf.stanford.edu  Thu Apr  3 08:14:21 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Thu, 3 Apr 2008 08:14:21 -0700
Subject: Problem gasonics SNF 2008-04-02 11:00:02: ashed wafer just fine, but did not put back....
Message-ID: <mailman.296.1356281732.3883.gasonics-pcs@snf.stanford.edu>

Ran 3 test wafers with no problems



From rik at snf.stanford.edu  Thu Apr 17 21:58:29 2008
From: rik at snf.stanford.edu (rik at snf.stanford.edu)
Date: Thu, 17 Apr 2008 21:58:29 -0700
Subject: Comment gasonics SNF 2008-04-17 21:58:29: Wafer found
Message-ID: <mailman.297.1356281732.3883.gasonics-pcs@snf.stanford.edu>

Found a wafer lying in the outbox for gasonics. Put it on a technicloth on top of the machine.



From nharjee at snf.stanford.edu  Sun Apr 20 00:03:48 2008
From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu)
Date: Sun, 20 Apr 2008 00:03:48 -0700
Subject: Problem gasonics SNF 2008-04-20 00:03:47: Wafer piece in chamber
Message-ID: <mailman.298.1356281732.3883.gasonics-pcs@snf.stanford.edu>

Full wafer went in, half a wafer came out. Gasonics, why couldn't you do this to my test wafer intead?



From nharjee at snf.stanford.edu  Sun Apr 20 01:50:41 2008
From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu)
Date: Sun, 20 Apr 2008 01:50:41 -0700
Subject: Comment gasonics SNF 2008-04-20 01:50:40: Removed piece
Message-ID: <mailman.299.1356281732.3883.gasonics-pcs@snf.stanford.edu>

With the help of other labmembers. Machine should be functional now.



From eenriquez at snf.stanford.edu  Mon Apr 21 08:20:42 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 21 Apr 2008 08:20:42 -0700
Subject: Problem gasonics SNF 2008-04-20 00:03:47: Wafer piece in chamber
Message-ID: <mailman.300.1356281732.3883.gasonics-pcs@snf.stanford.edu>

User recovered the wafer piece.  Cycled 6 wafers with no problems.



From eenriquez at snf.stanford.edu  Mon Apr 21 08:20:50 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 21 Apr 2008 08:20:50 -0700
Subject: Comment gasonics SNF 2008-04-20 01:50:40: Removed piece
Message-ID: <mailman.301.1356281732.3883.gasonics-pcs@snf.stanford.edu>

User recovered the wafer piece.  Cycled 6 wafers with no problems.