Problem gasonics SNF 2008-04-20 00:03:47: Wafer piece in chamber

nharjee at snf.stanford.edu nharjee at snf.stanford.edu
Sun Apr 20 00:03:48 PDT 2008

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Full wafer went in, half a wafer came out. Gasonics, why couldn't you do this to my test wafer intead?

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