Problem gasonics SNF 2008-04-20 00:03:47: Wafer piece in chamber
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Apr 21 08:20:42 PDT 2008
User recovered the wafer piece. Cycled 6 wafers with no problems.
More information about the gasonics-pcs
mailing list