From kevhuang at snf.stanford.edu Sat Aug 16 12:05:03 2008 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Sat, 16 Aug 2008 12:05:03 -0700 Subject: Problem gasonics SNF 2008-08-16 12:01:54: unloading problem Message-ID: unloading arm and receiving cassette is not aligned; wafer would get bumped on the receiver cassette and get dropped and stuck between chamber door and cassette, possibly breaking the wafer if user is not around From eenriquez at snf.stanford.edu Mon Aug 18 15:25:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Aug 2008 15:25:19 -0700 Subject: Shutdown gasonics SNF 2008-08-18 15:25:18: Unload arm speed Message-ID: Unload arm moves to quickly when going from chamber to cassette. From eenriquez at snf.stanford.edu Tue Aug 19 15:28:15 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 Aug 2008 15:28:15 -0700 Subject: Comment gasonics SNF 2008-08-19 15:28:14: Update Message-ID: Had no time to work on it. From cbaxter at snf.stanford.edu Tue Aug 19 20:11:51 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 19 Aug 2008 20:11:51 -0700 Subject: Shutdown gasonics SNF 2008-08-18 15:25:18: Unload arm speed Message-ID: The unload bimba cylinder is bad (leaking) will need to be change. I adjusted the plunger on so that it does not slammed when it unlload into the cassette, I cycled the tool w/out problem. Will order a new unload bimba cylinder. From cbaxter at snf.stanford.edu Tue Aug 19 21:04:17 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 19 Aug 2008 21:04:17 -0700 Subject: Comment gasonics SNF 2008-08-19 21:04:17: Cylinder Message-ID: Part number for the unload cylinder is A57-006-001 will order asap. From eenriquez at snf.stanford.edu Tue Aug 26 09:08:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 Aug 2008 09:08:47 -0700 Subject: Comment gasonics SNF 2008-08-19 15:28:14: Update Message-ID: Archived From cmcg at snf.stanford.edu Tue Aug 26 16:22:55 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Tue, 26 Aug 2008 16:22:55 -0700 Subject: Comment gasonics SNF 2008-08-26 16:22:55: possible to slow down the unloader arm? Message-ID: If things are being changed with the recieving cassette would it be possible to slow down the unloader arm? This thing seems to be on crack and slams the wafers into the cassette at high speed. Can be a tad bit scary for valuable wafers.