Problem gasonics SNF 2008-08-16 12:01:54: unloading problem

kevhuang at snf.stanford.edu kevhuang at snf.stanford.edu
Sat Aug 16 12:05:03 PDT 2008


unloading arm and receiving cassette is not aligned; wafer would get bumped on the receiver cassette and get dropped and stuck between chamber door and cassette, possibly breaking the wafer if user is not around




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