From jrjain at snf.stanford.edu Fri Jan 25 17:24:32 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 25 Jan 2008 17:24:32 -0800 Subject: Problem gasonics SNF 2008-01-25 17:24:31: Broken Wafer Message-ID: gasonics broke another user's wafer. We cleaned up as much as possible, but there are still some cm-size pieces far back on the metal frame in the chamber (far left). From jrjain at snf.stanford.edu Fri Jan 25 23:16:48 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 25 Jan 2008 23:16:48 -0800 Subject: Shutdown gasonics SNF 2008-01-25 23:16:47: Serious cantilever problem Message-ID: The back cantilever on the wafer holder is very loose, causing several serious problems. 1) Wafers tilt steeply towards the back. As a result, the vacuum arms rub against wafer backsides, dragging them off center and into a position where they break easily when the assembly moves in or out (this has already happened). 2) The assembly itself has difficulty moving in and out of the chamber. Take caution when opening the assembly for maintenance, because the back cantilever will hit the machine frame and cause the assembly to stop. The assembly should be opened slowly, with the back cantilever manually lifted so it can clear the frame out of the chamber. The machine has been turned off for safety purposes. From eenriquez at snf.stanford.edu Mon Jan 28 08:58:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Jan 2008 08:58:50 -0800 Subject: Shutdown gasonics SNF 2008-01-25 23:16:47: Serious cantilever problem Message-ID: The screw holding one of the wafer pins got loose. Retigntended the screw and releveled the wafer pins. Ran 20 wafers with no problems. From eenriquez at snf.stanford.edu Mon Jan 28 08:59:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Jan 2008 08:59:04 -0800 Subject: Problem gasonics SNF 2008-01-25 17:24:31: Broken Wafer Message-ID: The screw holding one of the wafer pins got loose. Retigntended the screw and releveled the wafer pins. Ran 20 wafers with no problems.