Problem gasonics SNF 2008-01-25 17:24:31: Broken Wafer

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri Jan 25 17:24:32 PST 2008


gasonics broke another user's wafer.  We cleaned up as much as possible, but there are still some cm-size pieces far back on the metal frame in the chamber (far left).




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