Shutdown gasonics SNF 2008-01-25 23:16:47: Serious cantilever problem

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri Jan 25 23:16:48 PST 2008


The back cantilever on the wafer holder is very loose, causing several serious problems.
1) Wafers tilt steeply towards the back.  As a result, the vacuum arms rub against wafer backsides, dragging them off center and into a position where they break easily when the assembly moves in or out (this has already happened).
2) The assembly itself has difficulty moving in and out of the chamber.  Take caution when opening the assembly for maintenance, because the back cantilever will hit the machine frame and cause the assembly to stop.  The assembly should be opened slowly, with the back cantilever manually lifted so it can clear the frame out of the chamber.
The machine has been turned off for safety purposes.




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