Shutdown gasonics SNF 2008-01-25 23:16:47: Serious cantilever problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jan 28 08:58:50 PST 2008


The screw holding one of the wafer pins got loose.  Retigntended the screw and releveled the wafer pins.  Ran 20 wafers with no problems.




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