Problem gasonics SNF 2008-01-25 17:24:31: Broken Wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Jan 28 08:59:04 PST 2008
The screw holding one of the wafer pins got loose. Retigntended the screw and releveled the wafer pins. Ran 20 wafers with no problems.
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