From masaharu at snf.stanford.edu Sat Jul 26 17:55:41 2008 From: masaharu at snf.stanford.edu (masaharu at snf.stanford.edu) Date: Sat, 26 Jul 2008 17:55:41 -0700 Subject: Problem gasonics SNF 2008-07-26 17:55:40: wafer broken inside Message-ID: I am really sorry that my wafer was broken inside. I took out as much pieces as possible, however there are several pieces inside. From eenriquez at snf.stanford.edu Mon Jul 28 14:30:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Jul 2008 14:30:51 -0700 Subject: Problem gasonics SNF 2008-07-26 17:55:40: wafer broken inside Message-ID: Cleaned chamber. Cycled wafers with no problems. The user had been processing a wafer with several ~ 3/4" diameter holes on it. From jwpchen at snf.stanford.edu Thu Jul 31 05:45:32 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Thu, 31 Jul 2008 05:45:32 -0700 Subject: Comment gasonics SNF 2008-07-31 05:45:31: wafer found Message-ID: on perforated metal below wafer path. I left it on top of the machine.