Problem gasonics SNF 2008-07-26 17:55:40: wafer broken inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 28 14:30:51 PDT 2008


Cleaned chamber.  Cycled wafers with no problems.  The user had been processing a wafer with several ~ 3/4" diameter holes on it.




More information about the gasonics-pcs mailing list