Problem gasonics SNF 2008-07-26 17:55:40: wafer broken inside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 28 14:30:51 PDT 2008

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Cleaned chamber.  Cycled wafers with no problems.  The user had been processing a wafer with several ~ 3/4" diameter holes on it.

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