From rostam at snf.stanford.edu Wed Jun 4 19:30:43 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 4 Jun 2008 19:30:43 -0700 Subject: Problem gasonics SNF 2008-06-04 19:30:42: load arm not fully up Message-ID: The error 'load arm not fully up' occurs for almost every wafer. I had to press start and the machine continued fine. From cbaxter at snf.stanford.edu Wed Jun 4 19:55:54 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Jun 2008 19:55:54 -0700 Subject: Problem gasonics SNF 2008-06-04 19:30:42: load arm not fully up Message-ID: Adjusted load arm during wafer pick up. From gth at snf.stanford.edu Sun Jun 8 00:04:56 2008 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Sun, 8 Jun 2008 00:04:56 -0700 Subject: Problem gasonics SNF 2008-06-08 00:04:54: can not grab wafer. Message-ID: the wafer grabbing assembly is screwed up. it can not pick up the wafer and fails repeatedly. interestingly, if i push start once more, it bumps onto my wafer and picks it up please have a look cheers -gaurav From cbaxter at snf.stanford.edu Sun Jun 8 16:51:56 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 8 Jun 2008 16:51:56 -0700 Subject: Problem gasonics SNF 2008-06-08 00:04:54: can not grab wafer. Message-ID: Adjusted load arm From rostam at snf.stanford.edu Mon Jun 9 13:58:11 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 9 Jun 2008 13:58:11 -0700 Subject: Problem gasonics SNF 2008-06-09 13:58:10: load arm not fully up Message-ID: the 'load arm not fully up' error is still there. have to push start for every wafer; especially the first one. From cbaxter at snf.stanford.edu Mon Jun 9 19:58:29 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Jun 2008 19:58:29 -0700 Subject: Comment gasonics SNF 2008-06-09 19:58:28: Load arm problem Message-ID: The problem is intermitten, working on the problem. From ofidaner at snf.stanford.edu Wed Jun 11 19:11:33 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Wed, 11 Jun 2008 19:11:33 -0700 Subject: Problem gasonics SNF 2008-06-11 19:11:32: output casette missing Message-ID: From emyers at snf.stanford.edu Mon Jun 16 08:19:24 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 16 Jun 2008 08:19:24 -0700 Subject: Problem gasonics SNF 2008-06-11 19:11:32: output casette missing Message-ID: Cassette has returned from it's trip. From kocabas at snf.stanford.edu Mon Jun 16 15:53:35 2008 From: kocabas at snf.stanford.edu (kocabas at snf.stanford.edu) Date: Mon, 16 Jun 2008 15:53:35 -0700 Subject: Problem gasonics SNF 2008-06-16 15:53:34: Wafer Broke Message-ID: The cassettes were in correct position, the loader arm was not aligned to the right casette. It tried to push the wafer in, the wafer broke. There might be an alignment issue. The wafer was a dummy so no harm was done. From cbaxter at snf.stanford.edu Mon Jun 16 20:39:33 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Jun 2008 20:39:33 -0700 Subject: Problem gasonics SNF 2008-06-16 15:53:34: Wafer Broke Message-ID: cleaned up broken wafer chips. From cbaxter at snf.stanford.edu Mon Jun 16 20:55:21 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Jun 2008 20:55:21 -0700 Subject: Problem gasonics SNF 2008-06-09 13:58:10: load arm not fully up Message-ID: Adjusted flag for up and set hard stop. From chen0622 at snf.stanford.edu Tue Jun 17 08:49:12 2008 From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu) Date: Tue, 17 Jun 2008 08:49:12 -0700 Subject: Problem gasonics SNF 2008-06-17 08:49:11: crossover error message Message-ID: "crossover error" message keeping coming out to pause the process, need to press the "start" button to resume. From cbaxter at snf.stanford.edu Tue Jun 17 19:52:36 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Jun 2008 19:52:36 -0700 Subject: Problem gasonics SNF 2008-06-17 08:49:11: crossover error message Message-ID: The pump was low on oil, re-cycled oil on catch pan. need to schedule down time and change the backing pump. From emyers at snf.stanford.edu Wed Jun 18 17:55:19 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 18 Jun 2008 17:55:19 -0700 Subject: Problem gasonics SNF 2008-06-18 17:55:18: Unload Arm Error Message-ID: The unload arm is not fully extending to get the wafer. Seems to pause before contacting the wafer. Hitting start extends the arm to the wafer and the process continues. Happens on almost all wafers. From cbaxter at snf.stanford.edu Sat Jun 21 07:37:23 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 21 Jun 2008 07:37:23 -0700 Subject: Problem gasonics SNF 2008-06-18 17:55:18: Unload Arm Error Message-ID: Level nest and adjusted unload arm. From mislam at snf.stanford.edu Sat Jun 21 18:05:17 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 21 Jun 2008 18:05:17 -0700 Subject: Problem gasonics SNF 2008-06-21 18:05:17: chamber won't vent Message-ID: From cbaxter at snf.stanford.edu Tue Jun 24 19:32:23 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 24 Jun 2008 19:32:23 -0700 Subject: Problem gasonics SNF 2008-06-21 18:05:17: chamber won't vent Message-ID: Cycled wafers and chamber is venting fine, tool has to be enable, atm sensor is connected to coral.