Problem gasonics SNF 2008-03-26 19:03:58: wafer stuck inside and screen is frozen, keypad is not working

emyers at snf.stanford.edu emyers at snf.stanford.edu
Thu Mar 27 10:00:38 PDT 2008


Lab Member note was still on the system, but no wafer was found in the chamber.  I reset the hardware and it seems OK.




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