From jrjain at snf.stanford.edu Wed May 14 23:58:35 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 14 May 2008 23:58:35 -0700 Subject: Problem gasonics SNF 2008-05-14 23:58:34: Load Arm Not Fully Up Message-ID: Got this error repeatedly throughout cassette From eenriquez at snf.stanford.edu Thu May 15 08:27:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 May 2008 08:27:48 -0700 Subject: Problem gasonics SNF 2008-05-14 23:58:34: Load Arm Not Fully Up Message-ID: Reset the system and ran 6 test wafers with no problems. From jrjain at snf.stanford.edu Thu May 15 16:22:43 2008 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Thu, 15 May 2008 16:22:43 -0700 Subject: Problem gasonics SNF 2008-05-15 16:22:42: Load Arm Error Again Message-ID: As before, get load arm error throughout cassette. Checked that wafers are in proper slots, i.e. not tilted. No apparent problem with wafers themselves. From eenriquez at snf.stanford.edu Fri May 16 08:39:43 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 May 2008 08:39:43 -0700 Subject: Problem gasonics SNF 2008-05-15 16:22:42: Load Arm Error Again Message-ID: Raised the load arm pick-up height. Cycled 50 wafers with no problems. From eenriquez at snf.stanford.edu Fri May 16 08:39:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 May 2008 08:39:50 -0700 Subject: Comment gasonics SNF 2008-04-17 21:58:29: Wafer found Message-ID: Noted