Problem gasonics SNF 2008-05-15 16:22:42: Load Arm Error Again

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu May 15 16:22:43 PDT 2008


As before, get load arm error throughout cassette.  Checked that wafers are in proper slots, i.e. not tilted.  No apparent problem with wafers themselves.




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