From rshyam at snf.stanford.edu Mon Nov 3 23:10:01 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Mon, 3 Nov 2008 23:10:01 -0800 Subject: Problem gasonics SNF 2008-11-03 23:10:01: Error: Door not closed Message-ID: From eenriquez at snf.stanford.edu Tue Nov 4 10:33:15 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Nov 2008 10:33:15 -0800 Subject: Problem gasonics SNF 2008-11-03 23:10:01: Error: Door not closed Message-ID: Reset the system. From mtan at snf.stanford.edu Mon Nov 10 13:21:53 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 10 Nov 2008 13:21:53 -0800 Subject: Problem gasonics SNF 2008-11-10 13:21:53: gas flow rate too low. process won't start Message-ID: From emyers at snf.stanford.edu Mon Nov 10 15:59:11 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Nov 2008 15:59:11 -0800 Subject: Comment gasonics SNF 2008-10-23 09:46:44: Update Low gas flow Message-ID: From emyers at snf.stanford.edu Mon Nov 10 15:59:51 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Nov 2008 15:59:51 -0800 Subject: Problem gasonics SNF 2008-10-17 04:10:33: gas 1 flow rate low Message-ID: Should be able to hit the resume and complete the process. The problem comes and goes. From emyers at snf.stanford.edu Mon Nov 10 16:00:01 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Nov 2008 16:00:01 -0800 Subject: Problem gasonics SNF 2008-10-17 09:30:39: gas 1 flow rate is low Message-ID: Should be able to hit the resume and complete the process. The problem comes and goes. From emyers at snf.stanford.edu Mon Nov 10 16:00:11 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Nov 2008 16:00:11 -0800 Subject: Problem gasonics SNF 2008-10-20 10:32:35: its true Message-ID: Should be able to hit the resume and complete the process. The problem comes and goes. From emyers at snf.stanford.edu Mon Nov 10 16:01:49 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Nov 2008 16:01:49 -0800 Subject: Problem gasonics SNF 2008-10-20 21:09:53: Same error Message-ID: Should be able to hit the resume and complete the process. The problem comes and goes. From emyers at snf.stanford.edu Mon Nov 10 16:02:09 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Nov 2008 16:02:09 -0800 Subject: Problem gasonics SNF 2008-11-10 13:21:53: gas flow rate too low. process won't start Message-ID: Should be able to hit the resume and complete the process. The problem comes and goes. From emyers at snf.stanford.edu Mon Nov 10 16:02:38 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 10 Nov 2008 16:02:38 -0800 Subject: Comment gasonics SNF 2008-11-10 16:02:38: Low Flow Problems Message-ID: Should be able to hit the resume and complete the process. The problem comes and goes. From king at snf.stanford.edu Tue Nov 11 01:22:21 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 11 Nov 2008 01:22:21 -0800 Subject: Problem gasonics SNF 2008-11-11 01:22:20: Missing machine dummy wafers Message-ID: It's important to test the function of the machine (especially wafer handling) before commiting valuable device wafers. From emyers at snf.stanford.edu Wed Nov 19 07:50:19 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Wed, 19 Nov 2008 07:50:19 -0800 Subject: Problem gasonics SNF 2008-11-11 01:22:20: Missing machine dummy wafers Message-ID: Dummy wafers have never been supplied for the system. From jsuarez at snf.stanford.edu Wed Nov 19 12:20:10 2008 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Wed, 19 Nov 2008 12:20:10 -0800 Subject: Shutdown gasonics SNF 2008-11-19 12:20:07: Dropping wafers Message-ID: From eenriquez at snf.stanford.edu Wed Nov 19 15:21:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Nov 2008 15:21:19 -0800 Subject: Shutdown gasonics SNF 2008-11-19 12:20:07: Dropping wafers Message-ID: One of the pins on the loading tray was loose. Retightened the pin and cleaned the door seal. Cycled 6 wafers with no problems. From zhangy at snf.stanford.edu Thu Nov 20 15:14:26 2008 From: zhangy at snf.stanford.edu (zhangy at snf.stanford.edu) Date: Thu, 20 Nov 2008 15:14:26 -0800 Subject: Problem gasonics SNF 2008-11-20 15:14:25: wafer stuck Message-ID: During the process there's an error of "output cassette full", after I reset the output cassette, the process was stuck, as well as one of my wafers. From emyers at snf.stanford.edu Thu Nov 20 15:53:04 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 20 Nov 2008 15:53:04 -0800 Subject: Problem gasonics SNF 2008-11-20 15:14:25: wafer stuck Message-ID: removed wafer and restarted system. wafer is located in the receive cassette From emyers at snf.stanford.edu Fri Nov 28 14:12:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 28 Nov 2008 14:12:31 -0800 Subject: Shutdown gasonics SNF 2008-11-28 14:12:31: No Gas1 Flow Message-ID: After Many tries, still no flow. In the past is was not meeting set point, no it's not flowing at all. From cbaxter at snf.stanford.edu Sat Nov 29 08:00:03 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 29 Nov 2008 08:00:03 -0800 Subject: Shutdown gasonics SNF 2008-11-28 14:12:31: No Gas1 Flow Message-ID: The o2 mfc is ok, the problem is with the pick and place controller pcb. On service mode, set flow at 3slm(1.5vdc) checked input on gas pcb is at 0vdc. Power down the tool and reseated j3 connector on pick and place pcb, flowed o2 on service mode from 1 to 10 slm and o2 is flowing. Cycled wafers w/out problem.