Shutdown gasonics SNF 2008-11-19 12:20:07: Dropping wafers

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Nov 19 15:21:19 PST 2008


One of the pins on the loading tray was loose.  Retightened the pin and cleaned the door seal.  Cycled 6 wafers with no problems.




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