Problem gasonics SNF 2008-11-20 15:14:25: wafer stuck

zhangy at snf.stanford.edu zhangy at snf.stanford.edu
Thu Nov 20 15:14:26 PST 2008


During the process there's an error of "output cassette full", after I reset the output cassette, the process was stuck, as well as one of my wafers.




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