From sbasumal at snf.stanford.edu Wed Oct 1 06:52:02 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Wed, 1 Oct 2008 06:52:02 -0700 Subject: Problem gasonics SNF 2008-10-01 06:52:01: gives error message.... Message-ID: 'unload arm out'....tried powering on and off ... and moving unload arm...too sleepy to figure out what else to do From wessmith at snf.stanford.edu Wed Oct 1 09:47:59 2008 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Wed, 1 Oct 2008 09:47:59 -0700 Subject: Problem gasonics SNF 2008-10-01 09:47:58: Gas 1 Flow Rate Low Message-ID: Unable to etch due to Gas 1 flow rate too low. From sbasumal at snf.stanford.edu Thu Oct 2 22:57:56 2008 From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu) Date: Thu, 2 Oct 2008 22:57:56 -0700 Subject: Problem gasonics SNF 2008-10-02 22:57:53: Base Pressure Off Limits Message-ID: From emyers at snf.stanford.edu Tue Oct 7 09:06:35 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 7 Oct 2008 09:06:35 -0700 Subject: Problem gasonics SNF 2008-10-02 22:57:53: Base Pressure Off Limits Message-ID: Ran recipe sequence reported by lab member without a problem. Gas reached set points and held. From emyers at snf.stanford.edu Tue Oct 7 09:07:05 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 7 Oct 2008 09:07:05 -0700 Subject: Problem gasonics SNF 2008-10-01 06:52:01: gives error message.... Message-ID: Ran system without any errors. From latta at snf.stanford.edu Tue Oct 7 14:37:57 2008 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Oct 2008 14:37:57 -0700 Subject: Problem gasonics SNF 2008-10-01 09:47:58: Gas 1 Flow Rate Low Message-ID: Not sure what's up with this message. O2 was fine for my 6 wafers. From rshyam at snf.stanford.edu Fri Oct 17 04:10:34 2008 From: rshyam at snf.stanford.edu (rshyam at snf.stanford.edu) Date: Fri, 17 Oct 2008 04:10:34 -0700 Subject: Problem gasonics SNF 2008-10-17 04:10:33: gas 1 flow rate low Message-ID: message is intermittent. does not happen everytime. From sjinpark at snf.stanford.edu Fri Oct 17 09:30:41 2008 From: sjinpark at snf.stanford.edu (sjinpark at snf.stanford.edu) Date: Fri, 17 Oct 2008 09:30:41 -0700 Subject: Problem gasonics SNF 2008-10-17 09:30:39: gas 1 flow rate is low Message-ID: Error: gas 1 flow rate is low From mleone at snf.stanford.edu Mon Oct 20 10:32:36 2008 From: mleone at snf.stanford.edu (mleone at snf.stanford.edu) Date: Mon, 20 Oct 2008 10:32:36 -0700 Subject: Problem gasonics SNF 2008-10-20 10:32:35: its true Message-ID: gas 1 flowrate too low. dont use 013 From nvgirish at snf.stanford.edu Mon Oct 20 21:09:54 2008 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Mon, 20 Oct 2008 21:09:54 -0700 Subject: Problem gasonics SNF 2008-10-20 21:09:53: Same error Message-ID: 013 shows low rate error. Does not seem to strip. From eenriquez at snf.stanford.edu Thu Oct 23 09:46:44 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Oct 2008 09:46:44 -0700 Subject: Comment gasonics SNF 2008-10-23 09:46:44: Update Low gas flow Message-ID: Cleaned gas 1's MFC connector contacts. Ran 40 wafers using recipe 13 with no problems. From ofidaner at snf.stanford.edu Fri Oct 24 04:29:01 2008 From: ofidaner at snf.stanford.edu (ofidaner at snf.stanford.edu) Date: Fri, 24 Oct 2008 04:29:01 -0700 Subject: Problem gasonics SNF 2008-10-24 04:29:01: Error: Door not closed Message-ID: Error "Door not closed" after finishing process (013). From eenriquez at snf.stanford.edu Fri Oct 24 10:43:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Oct 2008 10:43:53 -0700 Subject: Problem gasonics SNF 2008-10-24 04:29:01: Error: Door not closed Message-ID: Reset the system.