From kevhuang at snf.stanford.edu Tue Sep 2 13:03:12 2008 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Tue, 2 Sep 2008 13:03:12 -0700 Subject: Problem gasonics SNF 2008-09-02 13:03:11: chamber door slanted Message-ID: carrier will scratch the wafer From emyers at snf.stanford.edu Tue Sep 2 13:06:35 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 2 Sep 2008 13:06:35 -0700 Subject: Shutdown gasonics SNF 2008-09-02 13:06:33: Wafer Handler Problems Message-ID: Scratching wafers on both load and unload. Seems like the wafer tray needs adjustment. From mdickey at snf.stanford.edu Tue Sep 2 13:42:49 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 2 Sep 2008 13:42:49 -0700 Subject: Shutdown gasonics SNF 2008-09-02 13:06:33: Wafer Handler Problems Message-ID: Cycled a wafer in and out 3 times without a problem. Could mpy duplicate problem From eenriquez at snf.stanford.edu Thu Sep 4 14:25:11 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:25:11 -0700 Subject: Comment gasonics SNF 2008-08-26 16:22:55: possible to slow down the unloader arm? Message-ID: Replaced unloader arm pnuematic cylinder. Ran 5 wafers with no problems. From eenriquez at snf.stanford.edu Thu Sep 4 14:25:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:25:19 -0700 Subject: Comment gasonics SNF 2008-08-19 21:04:17: Cylinder Message-ID: Archived From eenriquez at snf.stanford.edu Thu Sep 4 14:25:47 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:25:47 -0700 Subject: Comment gasonics SNF 2008-07-31 05:45:31: wafer found Message-ID: Archived From eenriquez at snf.stanford.edu Thu Sep 4 14:26:36 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:26:36 -0700 Subject: Comment gasonics SNF 2008-06-09 19:58:28: Load arm problem Message-ID: Replaced unloader arm pnuematic cylinder. Ran 5 wafers with no problems. From eenriquez at snf.stanford.edu Thu Sep 4 14:27:00 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:27:00 -0700 Subject: Problem gasonics SNF 2008-08-16 12:01:54: unloading problem Message-ID: Replaced unloader arm pnuematic cylinder. Ran 5 wafers with no problems. From cmcg at snf.stanford.edu Thu Sep 4 19:10:44 2008 From: cmcg at snf.stanford.edu (cmcg at snf.stanford.edu) Date: Thu, 4 Sep 2008 19:10:44 -0700 Subject: Comment gasonics SNF 2008-09-04 19:10:43: worked fine for me Message-ID: you just have to keep your fingers crossed... From yeh at snf.stanford.edu Fri Sep 12 11:57:47 2008 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 12 Sep 2008 11:57:47 -0700 Subject: Problem gasonics SNF 2008-09-12 11:57:46: wafer stuck in chamber Message-ID: does not respond to "START" for resume nor "STOP" for abort. From yeh at snf.stanford.edu Fri Sep 12 11:57:53 2008 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Fri, 12 Sep 2008 11:57:53 -0700 Subject: Shutdown gasonics SNF 2008-09-12 11:57:52: Message-ID: From mdickey at snf.stanford.edu Fri Sep 12 14:12:43 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 12 Sep 2008 14:12:43 -0700 Subject: Shutdown gasonics SNF 2008-09-12 11:57:52: Message-ID: Ran 5 wafers with no problems From eenriquez at snf.stanford.edu Fri Sep 12 15:10:51 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Sep 2008 15:10:51 -0700 Subject: Problem gasonics SNF 2008-09-12 11:57:46: wafer stuck in chamber Message-ID: Recovered the wafer. Cycled 5 wafers with no problems. From lwchang at snf.stanford.edu Sun Sep 14 19:41:22 2008 From: lwchang at snf.stanford.edu (lwchang at snf.stanford.edu) Date: Sun, 14 Sep 2008 19:41:22 -0700 Subject: Problem gasonics SNF 2008-09-14 19:41:22: The loading arm would rotate the wafer when it's getting back for next wafer Message-ID: From huimei at snf.stanford.edu Tue Sep 16 10:19:12 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Tue, 16 Sep 2008 10:19:12 -0700 Subject: Shutdown gasonics SNF 2008-09-16 10:19:11: robut problem Message-ID: when loading and unloading, the wafer drop from the robut From eenriquez at snf.stanford.edu Tue Sep 16 12:00:48 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Sep 2008 12:00:48 -0700 Subject: Shutdown gasonics SNF 2008-09-16 10:19:11: robut problem Message-ID: One of the wafer support fingers was loose. Retightened finger and cycled wafers. From eenriquez at snf.stanford.edu Tue Sep 16 12:01:16 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 16 Sep 2008 12:01:16 -0700 Subject: Problem gasonics SNF 2008-09-14 19:41:22: The loading arm would rotate the wafer when it's getting back for next wafer Message-ID: One of the wafer support fingers was loose. Retightened finger and cycled wafers. From king at snf.stanford.edu Wed Sep 17 19:12:05 2008 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 17 Sep 2008 19:12:05 -0700 Subject: Problem gasonics SNF 2008-09-17 19:12:03: wafer handling and base pressure Message-ID: Arm loading errors to input cassette, and it also wouldn't achieve base pressure. Using recipes 013. From mislam at snf.stanford.edu Tue Sep 23 22:00:04 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 23 Sep 2008 22:00:04 -0700 Subject: Problem gasonics SNF 2008-09-23 22:00:01: Unload arm won't pick up wafer Message-ID: From eenriquez at snf.stanford.edu Wed Sep 24 10:59:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Sep 2008 10:59:27 -0700 Subject: Problem gasonics SNF 2008-09-23 22:00:01: Unload arm won't pick up wafer Message-ID: Increased cda pressure from 40 psi to 50. Also adjusted load arm height. Cycled 30 wafers without any problems. From eenriquez at snf.stanford.edu Wed Sep 24 10:59:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Sep 2008 10:59:35 -0700 Subject: Problem gasonics SNF 2008-09-17 19:12:03: wafer handling and base pressure Message-ID: Increased cda pressure from 40 psi to 50. Also adjusted load arm height. Cycled 30 wafers without any problems. From eenriquez at snf.stanford.edu Wed Sep 24 10:59:45 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Sep 2008 10:59:45 -0700 Subject: Comment gasonics SNF 2008-09-04 19:10:43: worked fine for me Message-ID: Archived From eenriquez at snf.stanford.edu Wed Sep 24 11:00:10 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Sep 2008 11:00:10 -0700 Subject: Problem gasonics SNF 2008-09-02 13:03:11: chamber door slanted Message-ID: Adjusted the door.