Shutdown gasonics SNF 2008-09-02 13:06:33: Wafer Handler Problems
emyers at snf.stanford.edu
emyers at snf.stanford.edu
Tue Sep 2 13:06:35 PDT 2008
Scratching wafers on both load and unload. Seems like the wafer tray needs adjustment.
More information about the gasonics-pcs
mailing list