Problem gasonics SNF 2008-08-16 12:01:54: unloading problem
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Sep 4 14:27:00 PDT 2008
Replaced unloader arm pnuematic cylinder. Ran 5 wafers with no problems.
More information about the gasonics-pcs
mailing list