Problem gasonics SNF 2008-09-12 11:57:46: wafer stuck in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Sep 12 15:10:51 PDT 2008

Previous message: Problem gasonics SNF 2008-09-12 11:57:46: wafer stuck in chamber
Next message: Shutdown gasonics SNF 2008-09-12 11:57:52:
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Recovered the wafer.  Cycled 5 wafers with no problems.

Previous message: Problem gasonics SNF 2008-09-12 11:57:46: wafer stuck in chamber
Next message: Shutdown gasonics SNF 2008-09-12 11:57:52:
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the gasonics-pcs mailing list