Shutdown gasonics SNF 2008-09-16 10:19:11: robut problem

huimei at snf.stanford.edu huimei at snf.stanford.edu
Tue Sep 16 10:19:12 PDT 2008

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when loading and unloading, the wafer drop from the robut

Previous message: Problem gasonics SNF 2008-09-14 19:41:22: The loading arm would rotate the wafer when it's getting back for next wafer
Next message: Shutdown gasonics SNF 2008-09-16 10:19:11: robut problem
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