Problem gasonics SNF 2008-09-14 19:41:22: The loading arm would rotate the wafer when it's getting back for next wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Sep 16 12:01:16 PDT 2008


One of the wafer support fingers was loose.  Retightened finger and cycled wafers.




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