Problem gasonics SNF 2008-09-17 19:12:03: wafer handling and base pressure

king at snf.stanford.edu king at snf.stanford.edu
Wed Sep 17 19:12:05 PDT 2008


Arm loading errors to input cassette, and it also wouldn't achieve base pressure.  Using recipes 013. 




More information about the gasonics-pcs mailing list